Enhanced Machine Upgrades from Strasbaugh

This design accommodates multiple wafer sizes on the 7AA without needing to switch chuck sizes. Compared to the original chuck, newer designs primarily use solid ceramics with porous ceramic inserts. The outer edge of the wafer is supported by a ceramic area that does not apply vacuum, while a few millimeters in, the porous vacuum ring secures the wafer. Benefits of this design include: 

• Reduced particulates on the tape or device side of the wafer. 
  
• Fewer particulates are flushed back onto the backside of the wafer during chuck cleaning by PP2. 
  
• More consistent Total Thickness Variation (TTV) over time due to fewer particulates reaching the porous area of the chuck. 
  
• Decreased chuck grinding and wheel wear. 

• Universal Chuck Assembly 
  
• Ceramic Dressing Stone 
  
• Water Regulator and Digital Gauge 
  
• Installation Instructions 
  
• Plumbing Diagram (110336A1), to be Used with the Original 7AA Print (110336) 

• 3” 
  
• 100mm 
  
• 125mm 
  
• 150mm 

Designed to accommodate thin and fragile wafers.

The 6BD can function as either a lapper or a polisher: 

• The standard 36” table has been upgraded to a 38” granite table. 
  
• New rings with ceramic inserts have been introduced. 
  
• The exhaust plenum is now integrated into the splash ring for improved functionality. 

I can also provide pressure plate assemblies for the 6BD, enhancing its versatility.