Strasbaugh 6EC Polisher
The Strasbaugh 6EC polisher is primarily used in a laboratory setting and is ideally suited for development work. Since it utilizes the same carriers and in general parameters as the 6DS-SP, a process can be migrated from the 6EC to the 6DS-SP. I can provide service and support on all assemblies and sub-assemblies of the 6EC.
Some of the more common items that can go wrong on the 6EC:
The Strasbaugh 6EC uses a combination of software to control the machine. The GUI, Mystic controller (OPTO 22), and the IQ Master (Conditioning arm) all have associated software. Most software issues are related to the battery failing on the Mystic. If you’re experiencing issues, please call us, and we’ll be happy to guide you in the right direction. Please make sure your SN and software version are available.
The OPTO 22 controller must have the battery replaced at regular intervals or the software will be lost, and your machine will not run. These controllers have been updated; however, some are now obsolete. In general, the software in the GUI must match the version in the Mystic or OPTO 22 controller.
When the software gets lost due to a battery failure, a “COM ERROR” is displayed on the GUI. On the Mystic, the battery LED will be displayed. This can also be displayed if the 5VDC power supply is out of tolerance, so check it before.
Originally, the machine had an amber screen, which was slow; the Windows versions are better. If you have an Amber screen, consider upgrading to a higher screen rating.
The conditioning arm was either powered or non-powered.
The Rotary union, whether one or two passage, will fail periodically depending on the use and media being passed through it. The two passage unions, which are installed on machines running the Viprr (Strasbaugh trademark) carrier, can be repaired using a repair kit. In most cases, unions are more expensive to repair than to replace.
The 6EC used two different types of motors on the quill (carrier drive). DC utilized a SCR controller and the AB Servo motor. Older units have reliance motor and amplifiers, which are the same as the AB (Software change). If you’re having problems with the quill rotating before picking up the wafer, go to the Setup screen and deselect the indexing of the carrier.
The option was utilized when running wafers with flats on the older gimbal as well as on Viprr 1 carriers. These carriers allowed putting an offset, which moved the downforce away from the flat. The index option was used to align the carrier in the same position before loading the substrate.
The Strasbaugh manual provides detailed instructions for calibrating the machine. As with all machines, it is important to have a PM schedule. Proper calibration of the machine will enable consistent results and address many of the general process issues. Ensure that records are kept with both before and after information. This aids in troubleshooting problems when service is requested. Strasbaugh provides calibration tools that aid in the calibration of the machine.
If you have issues or concerns with heavier or thicker substrates using any of the carrier or load setups available with the Strasbaugh 6EC, give me a call.
Strasbaugh 6EC Quick Change Table
The HC anodized Aluminum Top can be replaced. Used when testing different pads. The top can be removed with the pad attached. Multiple tops can be purchased.
Strasbaugh 6EC 2-Passage Union 284115
I can repair the 2-passage union.
Strasbaugh 6EC 1-Passage Union 110854
Replacement for the Deublin 1 passage union. It lasts longer, and if it leaks, the DI/Slurry doesn’t cause reducer failures.
Strasbaugh Gimbal Carrier 102mm with 2" Wafer template
2″ Carrier template attached to a 102mm 19-hole carrier. The outside backpressure holes are plugged, and the center 10 are used for the vacuum/backpressure. Adjustment of the wafer sensor would need to be performed to ensure that the machine knows when a wafer is present or not.
The load ring and lift, including the spider assembly, would need to be changed to allow the wafer to be moved into the pocket on the carrier. A dedicated carrier can also be created; however, using a template would be a more cost-effective option. The template still uses a standard DF200 film. Templates can also be made for different-sized carriers or different parts.