Speedfam Machines

The 22B Software (additional details can be provided):

• Time – The time is entered in Seconds, and the following limits apply. 
• Pre Slurry – 0-999 seconds 
  
• Step 1 to 5 – 0-99999 seconds.

The total time for all steps is approximately 139 hours, or 5.8 days.

Force – Downforce in lbs. This value is derived from the load cell, which is attached to the sub-cylinder. The PLC reads the load cell directly and is calibrated through the screen.

• Pre-Slurry – 0-500lbs 
  
• Steps 1 to 5 – 0-2000lbs 
  
• Force Ramp – in seconds 
  
• Pre-Slurry – 0- 60 seconds 
  
• Ramp Limits Steps 1 to 50 – 0-60 seconds.

(V2 and Later Software) The force ramp affects the Sony probe. During force ramping, the Sony will be disabled until the force ramp has been completed, plus the Comp Delay. If the force ramp is set to 5 (Seconds) and the comp delay variable is 1000 ms, the total time before the Sony will be enabled is 6000ms or 6 seconds. This change was made so that, regardless of the force ramp, the Sony would not engage until after the ramp was completed. This made the initial Sony reading more accurate.

Plate Drive Speed, remember this also controls the upper plate speed (on this particular machine). Only positive numbers should be entered, with a limit of +60. You do not need to enter the plus sign for a positive number; just enter the number. The following limits apply.

• Pre-Slurry – 0-20 
• Step 1 to 5 – 0-60 
  
• CW/CCW button, located on the left side of each speed setting and labeled with the current configuration. 
• Ring Speed – Controls the rotation and direction of the ring gear. 
  
• Ring gear speed can be entered as a positive number.

• Pre-Slurry – 0-10 
  
• Step 1 – 0-30 
  
• CW/CCW button, located on the left side of each speed setting and labelled with the current configuration. 
  
• Sun Gear Speed – Controls the sun gear speed 
  
• Pre-Slurry – 0-10 
  
• Step 1 to 5 – 0-40 
  
• CW/CCW button, located on the left side of each speed setting and labeled with the current configuration.

Thickness Setpoint – The target thickness sets the value that the Sony or linear scale should not exceed; if a reading exceeds it, the scale jumps to the next step. The thickness setpoint of each step can be set to the same value or a different value. The thickness offset can be adjusted if the Sony reading does not match the actual thickness of the part. The Thickness offset is a global variable and is not saved in the recipe. This value is a sign value as well, so it can be positive or negative.  

This value was added so that, for example, if the part thickness does not match the correct thickness measured on a calibrated gauge, the thickness can be adjusted without changing all the recipes used.

This function will be described in more detail later. There are also options when reading the probe during processing. The setup screen offers additional options, including the ability to enable averaging. 

Slurry 0/1 – This controls the ball valve, which supplies the slurry to the upper plate. When the slurry moves through the manifold blocks and onto the upper plate, it returns to the tank. An optional blowoff can also be provided, which is used to clear out the lines at the end of the process. This helps prevent lapping compound from settling in the fittings and/or lines, thereby preventing clogs.

Sony Probe/Linear Scale button – The Sony probe is the primary thickness measurement device, which is more accurate than the linear scale attached to the upper plate. If this button is pressed, then the linear scale is used for thickness measurement during processing. This setting is saved with the recipe. If it is set to display Sony, Sony will be used; if it is set to display the linear scale, then the linear scale is used.

Sony Probe – The probe has a resolution of 0.0005 microns (0.000019”) with an accuracy spec of 2 microns. 

• Resolution – 0.0005 microns (0.000019”)
  
• Accuracy – 2 microns or (0.0000787”)

The readings will be affected by other variables, such as but not limited to:

• Downforce 
  
• Plates
  
• Alignment 
  
• Parts

Linear Scale – The primary function of the linear scale is to determine the position of the upper plate. This allows the recipe to set the ability to change downforce during the “Slow Down” move. It can be used as an alternative to the Sony Probe by pressing the button; the Linear Scale will then display, and the process will be run based on the linear scale.

Ring/Sun Gear Position –The ring and sun gear up/down positions can be saved and adjusted according to the recipe. The recipe also allows the sun and ring gear position to be changed each cycle, preventing grooves from being worn in the ring and sun gear when using thin blue steel carriers.