Strasbaugh Legacy Polishers
Strasbaugh legacy polishers, the 6DT, 6DQ, and 6CU, had similar frames and overarms. The 6CU, followed by the 6DQ, were primarily used to polish wafers, while the 6DT was originally designed to polish square interconnect tiles. These machines can all be set up to polish multiple wafers per carrier using templates. I can supply parts and service on these machines.

Gimbal Vacuum Chuck
Replaces the existing shaft and vacuum cup on the 6DT, 6DQ, and 6CU. Polishing wafers on the 6DT would also require the nest used for loading and unloading the tiles to be replaced, and wafer carriers to be purchased. The lower flange bearing on the 6DT has a larger ID, and the shaft is slightly different to accommodate this. You can also view this chunk in the machine gallery under Strasbaugh.

