Machine Accessories
Slurry systems and vacuum separators are among the value-added machine accessories I manufacture for the machines that Ronnebaum Technical Services supports. If you have a special request, please don’t hesitate to call me at (515) 778-0895.
Vacuum Separators
A vacuum separator is used to separate out wastewater and route it to the drain. These systems are used in conjunction with polishers and grinders that utilise a vacuum.
VS1 Separator
PLC-controlled and has the ability to communicate with a host. Alarms are configurable so that if a sensor fails, the system can run on a scheduled basis. The VSI has the option of using water to flush the tanks, keeping them clean, depending on the medium. The tanks can also be removed easily.
CS1 Separator
This uses a timer valve and operates continuously according to this time cycle. The system is straightforward but effective.
Both systems are built to run continuously without failure.
CS2 Vacuum Separator
Similar to the CS1 with a larger capacity. The unit replaced the vacuum pump assembly on the Disco 82IF/8 backgrinder and can be used on other backgrinders or CMP systems.
- Tanks can be removed and cleaned.
- All tubing, fittings, and valves coming in contact with fluid are Teflon.
- Enough volume to allow connection to multiple tools, this is subject to the time setting, unless PLC-controlled.
PLC control is optional, as are I/O connections to connect to the customer’s machine or host.
Strasbaugh 7AA Work Chucks
Strasbaugh 7AA standard vacuum chucks can be rebuilt. If you have a 7AA and would like your chucks rebuilt, please contact me at (515) 778-0895.
I also make new chucks for the 7AA. The universal chuck is designed for customers who require switching between multiple sizes.
The New 7AA chuck is for individual-sized wafers and can be purchased in the following sizes:
- 3”
- 100mm
- 125mm
- 150mm
Strasbaugh 7AF Work Chucks
The 7AF chuck is for individual size wafers and can be purchased in the following sizes:
- 3”
- 100mm
- 125mm
- 150mm
- 200mm
Portable CMP Slurry Tank
- 30 Gallon cone-bottom or flat-bottom tank.
- The mixer (variable speed) can be moved up and down, as well as in and out.
- CPC PVDF fittings on both the tank connections and the I/O connections.
- Capacitance sensor for “Low Level Limit”.
- Capacitance sensor for “Leak Detection”
- I/O connections can be mounted on the sides or rear of the system.
- Slurry containment: 13 gallons.
- Rear wheel lock.
- A peristaltic pump and a diaphragm pump can both be installed on the system. Additionally, there are two peristaltic pumps on the same system.
- Made to Order.
Small Wafer Washer
- PLC Control and HMI allowing the storage of recipes.
- Megasonic nozzle, either single or dual frequency.
- Brush arm.
- Multiple fluid nozzles.
- Different chucks are available for either wafers or tape frames.
- Servo-controlled.